Atomic Layer Deposition as a Tool of Surface Engineering

World Scientific News, Tom 108 (2018) s. 99-110
H. Tiznado, D. Domínguez, H. Borbón-Nuñez, J. López, E. Lizárraga, J. M. Romo-Herrera, E. Murillo-Bracamontes, G. Soto

 

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